Products
Integration:
- Major modules
- Mechatronics
- Gas & liquid delivery
Manufacturing:
- Weldments
- Gas line heaters
- Thermocouples
- Frames
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Services - QuantumClean
UHP cleaning:
- Machined parts
- Aluminum
- Stainless steel
- Quartz
- Weldments
Cleanliness Verification:
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Services - ChemTrace
Expertise in the analysis of:
- Process tool parts
- Wafers
- Airborne molecular contamination
- High purity chemicals
Semiconductor - focused analytical processes include:
- Trace metals
- Metallic & ionic contamination
- Organic contamination
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Engineering
Technology leadership for sub - 7 nm requirements
Engineering consulting & design:
- DFM
- Test
- Cleaning development
R & D:
- New cleaning techniques
- High sensitivity analytical testing
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